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      D系列高壓轉(zhuǎn)動/擺動低速旋接器

      Heidenhain敞開式直線光柵尺

      Heidenhain敞開式直線光柵尺與讀數(shù)頭和光柵尺或鋼帶間沒有機(jī)械接觸。這些光柵尺的典型應(yīng)用包括:測量機(jī)、比較儀和其它長度計量精密設(shè)備以及生產(chǎn)和測量設(shè)備,例如用在半導(dǎo)體工業(yè)中。
      產(chǎn)品簡述


      Heidenhain敞開式直線光柵尺//海德漢敞開式直線光柵尺


      敞開式光柵尺與讀數(shù)頭和光柵尺或鋼帶間沒有機(jī)械接觸。這些光柵尺的典型應(yīng)用包括:測量機(jī)、比較儀和其它長度計量精密設(shè)備以及生產(chǎn)和測量設(shè)備,例如用在半導(dǎo)體工業(yè)中。

      敞開式直線光柵尺設(shè)計用于需要高精度測量的機(jī)床和系統(tǒng)
      典型應(yīng)用包括:

      • 半導(dǎo)體工業(yè)的測量和生產(chǎn)設(shè)備
      • PCB電路板組裝機(jī)
      • 超精密機(jī)床
      • 高精度機(jī)床
      • 測量機(jī)和比較儀,測量顯微鏡和其它精密測量設(shè)備
      • 直接驅(qū)動
      • 海德漢系統(tǒng)
        海德漢光柵
        海德漢編碼器

        Heidenhain
        Heidenhain數(shù)控系統(tǒng)

        敞開式直線光柵尺 



      Absolute encoders and encoders with position value output

      LIC

      The LIC exposed linear encoders permit absolute position measurement both over large paths of traverse up to 27 m and at high traversing speed. In their dimensions and mounting, they match the LIDA 400.

      ± 0.08 μm

      Up to 27040 mm

       LIP 200

      The LIP 211 and LIP 291 incremental linear encoders output the position information as a position value. The sinusoidal scanning signals are highly interpolated in the scanning head and converted to a position value by the integrated counter function. As with all incremental encoders, the absolute reference is determined with the aid of reference marks.

      ± 0.001 μm

      Da 20 mm a 3040 mm

      Incremental encoders

      LIP

      The LIP exposed linear encoders are characterized by very small measuring steps together with very high accuracy and repeatability. They operate according to the interferential scanning principle and feature a DIADUR phase grating as the measuring standard.

      Up to ± 0.04 μm

      Up to 3040 mm

      LIF

      The LIF exposed linear encoders have a measuring standard manufactured in the SUPRADUR process on a glass substrate and operate on the interferential scanning principle. They feature high accuracy and repeatability, are especially easy to mount, and have limit switches and homing tracks. The special version LIF 481 V can be used in high vacuum up to 10–7 bar (see separate Product Information sheet).

      ± 0.04 μm

      Up to 1020 mm

      LIDA

      The LIDA exposed linear encoders are specially designed for high traversing speeds up to 10 m/s, and are particularly easy to mount with various mounting possibilities. Steel scale tapes, glass or glass ceramic are used as carriers for METALLUR graduations, depending on the respective encoder. They also feature a limit switch.

      Up to ± 0.2 μm

      Up to 30040 mm

      PP

      On the PP two-coordinate encoder, a planar phase-grating structure manufactured with the DIADUR process serves as the measuring standard, which is scanned interferentially. This makes it possible to measure positions in a plane.

      ± 0.04 μm

      Measuring range 68x68mm

      LIC 4100

      Type

      Substrate and mounting

      Coefficient of
      expansion 

      Position error per signal period

      Meas.
      length

      LIC 4113
      undefinedLIC 4193

      Glass or glass ceramic scale, bonded to the mounting surface

      ≈ (0±0,1) x 10-6K-1

      ≈ 8 x 10-6K-1

      ± 0,04 μm

      240 mm to 3040 mm

      LIC 4115
      LIC 4195

      Steel scale tape drawn into aluminum extrusions and tensioned

      Same as mounting surface

      ± 0,04 μm

      140 mm to 28440 mm

      LIC 4117
      LIC 4197

      Steel scale tape drawn into aluminum extrusions and fixed

      ≈ 10 x 10-6K-1

      ± 0,04 μm

      240mm to 6040 mm

      LIC 4119
      LIC 4199

      Steel scale tape, cemented on mounting surface

      ≈ 10 x 10-6K-1

      ± 0,04 μm

      70 mm to 1020 mm

      LIC 2100

      Type

      Substrate and mounting

      Coefficient of expansion

      Position error per signal period

      Meas. length

      LIC 2117
      LIC 2197

      Steel scale tape drawn into aluminum extrusions and fixed

      ? ≈ 10 x 10-6K-1

      ± 1,5 μm

      120 mm to 3020 mm

      LIC 2119
      LIC 2199

      Steel scale tape, cemented on mounting surface

       ≈ 10 x 10-6K-1

      ± 1,5 μm

      120 mm to 3040 mm

      LIDA series for high traversing speeds and large measuring lengths

      Model

      Substrate and mounting

      Expansion
      coefficient

      Position error
      per signal period

      Measuring length

      Interface

      LIDA 473
      LIDA 483

      Glass or glass ceramic scale, bonded to the mounting surface

      ≈ 0 x 10-6K-1
      or
      ≈ 8 x 10-6K-1

      ± 0.2 μm

      240 mm to 3040 mm

      TTL
      1 VPP

      LIDA 475
      LIDA 485

      Steel scale tape drawn into aluminum extrusions and tensioned

      Same as mounting surface

      ± 0.2 μm

      140 mm to 30040 mm

      TTL
      1 VPP

      LIDA 477
      LIDA 487

      Steel scale tape drawn into aluminum extrusions and fixed

      ≈ 10 x 10-6K-1

      ± 0.2 μm

      240 mm to 6040 mm

      TTL
      1 VPP

      LIDA 479
      LIDA 489

      Steel scale tape, cemented on mounting surface

      ≈ 10 x 10-6K-1

      ± 0.2 μm

      Up to 6000 mm

      TTL
      1 VPP

      LIDA 277
      LIDA 287

      Steel scale tape drawn into aluminum extrusions and fixed

      ≈ 10 x 10-6K-1

      ± 2 μm

      Up to 10000 mm

      TTL
      1 VPP

      LIDA 279
      LIDA 289

      Steel scale tape, cemented on mounting surface

      ≈ 10 x 10-6K-1

      ± 2 μm

      Up to 10000 mm

      TTL
      1 VPP

      LIF series for high accuracy

      Model

      Substrate and mounting

      Expansion 
      coefficient 

      Position error
      per signal period

      Measuring length

      Interface

      LIF 471
      LIF 481

      Scale of Zerodur glass ceramic 
      or glass, bonded with
      PRECIMET adhesive film

      ≈ 8 x 10-6K-1

      ± 0.04 μm

      70 mm to 1020 mm

      TTL
      1 VPP

      LIP series for very high accuracy

      Model

      Substrate and mounting

      Expansion
      coefficient

      Position error
      per signal period

      Measuring length

      Interface

      LIP 372
      LIP 382

      Zerodur glass ceramic embedded 
      in bolted-on Invar carrier

      ≈ 0 x 10-6K-1

      ± 0.001 μm

      70 mm to 270 mm

      TTL
      1 VPP

      LIP 211
      LIP 281
      LIP 291

      Scale of Zerodur glass ceramic 
      with fixing clamps

      ≈ 0 x 10-6K-1

      ± 0.001 μm

      20 mm to 3040 mm

      1 VPP
      EnDat 2.2

      LIP 471
      LIP 481

      Scale of Zerodur glass ceramic 
      or glass with fixing clamps

      ≈ 0 x 10-6K-1
      or

      ≈ 8 x 10-6K-1

      ± 0.02 μm

      70 mm up to 3040 mm

      TTL
      1 VPP

      LIP 571
      LIP 581

      Glass scale, fixed with clamps

      ≈ 8 x 10-6K-1

      ± 0.04 μm

      70 mm to 1020 mm

      TTL
      1 VPP

      海德漢
      海德漢數(shù)控系統(tǒng)
      Heidenhain光柵

       
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